AP Batch Series Plasma Treatment Equipment

Nordson MARCH's AP series of vacuum plasma treatment systems includes batch units with small, mid-size and large vacuum chamber options that deliver process correlation, controller continuity and reliable, reproducible vacuum gas plasma treatment to customers as they expand from an R&D environment to various levels of production

AP series plasma treatment machines are suitable for a wide variety of plasma cleaning, surface activation and adhesion improvement applications. These capabilities are used for semiconductor manufacturing, microelectronic packaging and assembly, and by manufacturers of medical and life science devices. The AP Series consists of four batch plasma treatment systems offering small, mid-size and large vacuum chamber options that deliver process correlation, controller continuity and reliable, reproducible vacuum gas plasma treatment to customers as they expand from an R&D environment to various levels of production.

AP-300 and AP-600 Plasma Treatment Machines: The AP-300 and AP-600 plasma treatment machines are benchtop-style, completely self-contained, requiring minimal bench space. The system chassis houses the plasma chamber, control electronics, 13.56 MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system). Maintenance access is provided through an interlocked door or removable panels. The plasma chamber supports up to 7 removable and adjustable powered or grounded shelves to accommodate a wide range of piece-parts, components, and part carriers including magazines, trays, and boats. The vacuum plasma treatment systems can accommodate a wide range of process gases including argon, oxygen, hydrogen, helium, and fluorinated gases. Both models come standard with two (2) electronic mass flow controllers for optimal gas control, with another two (2) available optionally (4 total max.). Convenient facility hook-ups for periodic calibration requirements used in validation processes.